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Home > Product > Ferrule Fittings > Industries & Applications > Ferrule Fittings for Semiconductor & Vacuum Applications

Ferrule Fittings for Semiconductor & Vacuum Applications – PE-LOCK Ultra-Clean Compression Fittings for High-Purity & UHV Systems

Perfect Engineers, through its precision-grade brand PE-LOCK, manufactures and exports Ferrule Fittings for Semiconductor & Vacuum Applications, designed for ultra-high-purity (UHP) gas delivery, vacuum instrumentation, and cleanroom fluid systems. Engineered to meet the demanding requirements of the semiconductor, chip fabrication, MEMS, and vacuum coating industries, PE-LOCK fittings ensure zero contamination, leak-free sealing, and ultra-clean surface finishes.

From process gases like nitrogen, argon, silane, to ultra-pure water (UPW) and vacuum chamber instrumentation, our fittings are trusted in Class 100 and Class 10 cleanroom facilities globally.

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Why PE-LOCK Ferrule Fittings Are Ideal for Semiconductor & Vacuum Use

  • Electropolished Surface Finish – Ra ≤ 0.25 µm (10 µin) for contamination-free performance
  • Zero-Dead-Leg Design – Eliminates particle traps and microbial growth risks
  • Helium Leak Tested on Request – Suitable for UHV & ultra-clean gas lines
  • Moisture-Free Packaging – Cleanroom sealed and nitrogen-purged (on request)
  • Reusable, Non-Corrosive – Compatible with UPW, clean chemicals, and vacuum gases
  • Swagelok®, Parker®, Hy-Lok® Compatible – Interchangeable with leading brands

PE-LOCK Fittings Used in UHP & Vacuum Systems

Available Configurations

  1. Straight / Reducing Union
  2. Male / Female Connectors (UNF, NPT, ISO, BSP)
  3. Union Elbow | Tee | Cross
  4. Bulkhead Fittings | Panel Mount Adapters
  5. Weld-End & Vacuum Flange Adapters
  6. End Caps, Tube Plugs, Nuts & Front/Back Ferrules

Material Options

  1. SS316L (Low-S, High-Purity ASTM A479)
  2. SS316L Electropolished (EP)
  3. Nickel 200 / 201 – for HF & specialty gases
  4. Hastelloy C-22 – for corrosive chemical vapor flows
  5. PTFE-lined fittings – for non-stick and chemical compatibility

Technical Summary

Parameter Specification
Size Range 1/8” to 1” (3 mm to 25 mm OD)
Surface Finish Electropolished Ra ≤ 0.25 µm (on request)
Leak Test Helium Leak Test (1×10⁻⁹ mbar·l/s on request)
Pressure Rating Up to 6,000 PSI
Temperature Range -100°C to +400°C
Packaging Cleanroom-grade sealed bags, optional nitrogen purge
Certifications ISO 9001:2015, EN 10204 3.1, Helium Leak, SEMI F20 compatible
Compliance ROHS, REACH, DFARS, FDA-grade options available

Cleanroom Packaging & UHP Support

  • Double poly-wrapped in Class 100 cleanroom environment
  • Desiccant-packed and batch traceable
  • OEM/private labeling with barcode scanning and serial marking
  • Supplied With:
    • Material Test Certificate (EN 10204 3.1)
    • Helium Leak & Surface Finish Report (on request)
    • Dimensional Test Certificate

Contact Us for Pricing & OEM Support

Call

+91-9004860491

E-mail

[email protected]

Website

www.perfectqrc.com

Key Application Areas in Semiconductor & Vacuum Systems

Semiconductor Fabrication

  1. Ultra-high-purity (UHP) gas distribution manifolds
  2. Silane (SiH₄), phosphine (PH₃), ammonia (NH₃), and dopant gas lines
  3. Cleanroom-grade nitrogen, CDA (clean dry air), and hydrogen panels

Electronics & Cleanroom Manufacturing

  1. Wet benches and chemical dispense skids
  2. UPW (ultra-pure water) distribution and return
  3. CDA lines in microelectronics packaging facilities

Vacuum & Thin Film Deposition

  • Vacuum chamber tubing connections (UHV and HV)
  • Cryo-pump and roughing pump exhaust lines
  • Mass spectrometry, plasma etching, and CVD system manifolds

Display, LED & Solar Cell Equipment

  • High-purity gas and vacuum lines for OLED and TFT fabrication
  • Argon, CF₄, and N₂O delivery systems
  • PECVD, ALD, and sputtering instrumentation loops

Buyer-Focused FAQs

Absolutely. We supply leak-tight fittings for UHV and HV vacuum environments.

Yes. Cleanroom-packaged fittings with nitrogen purge and lot tracking are available.

Yes. 100% functional and dimensional compatibility is ensured.

Yes. We use ASTM A479 low-S grade SS316L specifically for UHP and semiconductor-grade systems.

Helium leak testing up to 1×10⁻⁹ mbar·l/s is offered on request.

Yes. We recommend Nickel 200 or PTFE-lined fittings for HF, fluorine, and other reactive gases.

MOQ is flexible. Standard delivery: 7–12 working days depending on quantity and alloy.

Ready to Connect Faster, Safer, Smarter?

Explore Configurations, Compare Materials, and Get Prices Fast
We serve purchase heads, OEMs, and end-users with tailored Ferrule Fittings for Semiconductor & Vacuum Applications – PE-LOCK Ultra-Clean Compression Fittings for High-Purity & UHV Systems recommendations and commercial pricing.
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In the year 1988

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